Mass Air Flow SensorPreliminary Datasheet SFC6000D Mass Flow Controller and SFM6000D Flow Meter Characteristics: Disruptive concept combining plastic body and highly integrated electronics Small form factor and low weight High accuracy/repeatability (2% / 0.2% of set point) Wide control range (500:1) Ultra-fast settling time (100 ms) RS485 and I2C digital interface Exchangeable 6 mm push-in and downmount connectors NIST traceable calibration No drift and no re-calibration required in the field
Introductory Description CMOSens SFC6000D and SFM6000D measure gas mass flow by the calorimetric principle based on heat transfer. A heater element on a thermally insulated membrane and two thermopiles up-stream and downstream are integrated on a single silicon chip. In the presence of gas flow, the temperature distribution upand downstream is disturbed. This asymmetry is then measured. The measurement area as well as the A/Dconverter and further signal processing are based on a single chip using CMOS standard processes (see Figure 2). Moreover, the same chip also takes over the function of a microprocessor in a standard mass flow controller, directly regulating the valve. This drastically reduces the complexity and number of electronic components in SFC6000D.
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